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In-Situ/Operando Setups
High-pressure DAC
Vacuum related
High and low temperature
X-ray related
Environmental monitoring
Basic in laboratory
Used in laboratory
Order
Target
Substrate
Metal
non-metallic meterial
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reagent and gas
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Ceramic target
SiO2

靶材简介:

      简单说的话,靶材是高速荷能粒子轰击的目标材料。有金属类、合金类、氧化物类等等。例如:蒸发磁控溅射镀膜是加热蒸发镀膜...铝膜等。更换不同的靶材(如铝、铜、不锈钢、钛、镍靶等),即可得到不同的膜系(如超硬、耐磨、防腐的合金膜等)。

靶材参数:

材料纯度

99.99% 

材料密度

90% 

 

靶材形状

圆形靶材

旋转靶材

矩形靶材

拼接靶材

最大尺寸

200mm

Ø200×60mm

200×200mm

200×1000mm

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